红外微测辐射热计结构优化设计与制备
| dc.contributor.advisor | 陈松岩 | |
| dc.contributor.advisor | 方辉 | |
| dc.contributor.author | 何熙 | |
| dc.date.accessioned | 2016-02-14T08:10:27Z | |
| dc.date.available | 2016-02-14T08:10:27Z | |
| dc.date.issued | 2008-12-26 15:31:35.0 | |
| dc.date.replied | 2008-06-02 | |
| dc.description.abstract | 红外探测器是应用于热成像的主要探测技术，在国防、航天领域具有重要的战略意义。作为当今非制冷热成像的主流技术，氧化钒(VOx)微测辐射热计焦平面成像阵列具有重量轻、成本低，且符合单兵作战装备要求等优点，成为世界各国许多商业机构和研究单位竞相开发的目标。但是，焦平面阵列制备涉及集成电路设计、红外光学、薄膜生长、MEMS工艺等众多技术，是一项复杂的系统工程。 本文针对红外微测辐射热计器件结构优化设计、薄膜生长以及器件制备工艺进行研究，成功地制备出具有微桥结构的、热敏材料为VOx的微测辐射热计像元，桥面为SiNx/VOx/SiNx三明治结构，由被SiO2包裹的AL微柱所支撑。器件具有红外响应特性。本... | |
| dc.description.abstract | Thermal imaging is one of the major detecting technologies used in national security that plays an important role in the domains of national defence and spaceflight. Among all kinds of thermal imaging technologies, uncooled focal plane array (UFPA) using vanadium dioxide as the thermal sensing material has become a hotspot due to its high performance, light weight and low cost. Whereas, the fabric... | |
| dc.description.note | 学位：理学硕士 | |
| dc.description.note | 院系专业：物理与机电工程学院物理学系_凝聚态物理 | |
| dc.description.note | 学号：20051301646 | |
| dc.identifier.uri | https://dspace.xmu.edu.cn/handle/2288/54655 | |
| dc.language.iso | zh_CN | |
| dc.relation.uri | https://catalog.xmu.edu.cn/opac/openlink.php?strText=19023&doctype=ALL&strSearchType=callno | |
| dc.source.uri | https://etd.xmu.edu.cn/detail.asp?serial=17770 | |
| dc.subject | 红外成像 | |
| dc.subject | 微机电 | |
| dc.subject | PI牺牲层 | |
| dc.subject | Infrared Imaging | |
| dc.subject | MEMS | |
| dc.subject | PI Sacrificial Layer | |
| dc.title | 红外微测辐射热计结构优化设计与制备 | |
| dc.title.alternative | Structure design optimization and fabrication of infrared microbolometer | |
| dc.type | thesis |
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